Optimized pulsed laser deposition by wavelength and static electric field control: The case of tetrahedral amorphous carbon films
Φόρτωση...
Ημερομηνία
Συγγραφείς
Patsalas, P.
Kaziannis, S.
Kosmidis, C.
Papadimitriou, D.
Abadias, G.
Evangelakis, G. A.
Τίτλος Εφημερίδας
Περιοδικό ISSN
Τίτλος τόμου
Εκδότης
American Institute of Physics
Περίληψη
Τύπος
Είδος δημοσίευσης σε συνέδριο
Είδος περιοδικού
peer reviewed
Είδος εκπαιδευτικού υλικού
Όνομα συνεδρίου
Όνομα περιοδικού
Journal of Applied Physics
Όνομα βιβλίου
Σειρά βιβλίου
Έκδοση βιβλίου
Συμπληρωματικός/δευτερεύων τίτλος
Περιγραφή
We report on the application of a static (dc) electric field in the plume region during the pulsed Nd doped yttrium aluminum garnet laser deposition (PLD) of tetrahedral amorphous carbon (ta-C) films in vacuum ambient (pressure=10(-4)-10(-3) Pa), where the working pressure is exclusively due to ablation vapor. This approach is strikingly different from the plasma- or ion-beam-assisted PLD because the mean free path at this pressure is by far longer than the target to substrate distance. Thus, the electric field interacts with individual ionized species invoking ion acceleration and gas-phase reactions among different ionized species. These phenomena are clearly dependent on the laser wavelength (first, second, or third harmonic, lambda=1064, 532, and 355 nm, respectively) used for the ablation. We found that the application of the electric field causes surface smoothing (the roughness decreases from about 1 to 0.4 nm) and faster deposition rate (from about 2 to 7 nm/min) for the second and third harmonics. In addition, the phenomena are less intense in the case of the first harmonic due to the low concentration of ionized species in the plume. In addition, in the case of PLD using lambda=532 nm, the electric field improves the film's density (from 2.60 to 2.95 g/cm(3)). The correlations found are discussed in terms of the ablated species and the deposition mechanisms of the ta-C. (c) 2007 American Institute of Physics.
Περιγραφή
Λέξεις-κλειδιά
cross-sectional structure, substrate-temperature, thin-films, a-c, diamond, ablation, growth, graphite, fraction, surface
Θεματική κατηγορία
Παραπομπή
Σύνδεσμος
<Go to ISI>://000247625700137
http://link.aip.org/getpdf/servlet/GetPDFServlet?filetype=pdf&id=JAPIAU000101000012124903000001
http://link.aip.org/getpdf/servlet/GetPDFServlet?filetype=pdf&id=JAPIAU000101000012124903000001
Γλώσσα
en
Εκδίδον τμήμα/τομέας
Όνομα επιβλέποντος
Εξεταστική επιτροπή
Γενική Περιγραφή / Σχόλια
Ίδρυμα και Σχολή/Τμήμα του υποβάλλοντος
Πανεπιστήμιο Ιωαννίνων. Σχολή Θετικών Επιστημών. Τμήμα Μηχανικών Επιστήμης Υλικών