Magnetron sputtered carbon nitride: composition and chemical bonding of as-grown and post-annealed films studied with real-time and in situ diagnostic techniques
| dc.contributor.author | Gioti, M. | en |
| dc.contributor.author | Logothetidis, S. | en |
| dc.contributor.author | Patsalas, P. | en |
| dc.contributor.author | Laskarakis, A. | en |
| dc.contributor.author | Panayiotatos, Y. | en |
| dc.contributor.author | Kechagias, V. | en |
| dc.date.accessioned | 2015-11-24T17:35:40Z | |
| dc.date.available | 2015-11-24T17:35:40Z | |
| dc.identifier.issn | 0257-8972 | - |
| dc.identifier.uri | https://olympias.lib.uoi.gr/jspui/handle/123456789/14157 | |
| dc.rights | Default Licence | - |
| dc.subject | carbon nitride | en |
| dc.subject | chemical bonds | en |
| dc.subject | ellipsometry | en |
| dc.subject | reactive sputtering | en |
| dc.subject | thin-films | en |
| dc.subject | amorphous-carbon | en |
| dc.subject | discharge | en |
| dc.title | Magnetron sputtered carbon nitride: composition and chemical bonding of as-grown and post-annealed films studied with real-time and in situ diagnostic techniques | en |
| heal.abstract | We prepared CNx films by reactive r.f. magnetron sputtering from a graphite target in a pure N-2 plasma, with different substrate bias voltages (V-b) We studied the optical properties of CN, films by using the in situ spectroscopic ellipsometry (SE) in the energy region 1.5-5.5 eV. The differences in compositional and bonding configuration between CNx films, provided by the SE data analysis, are discussed and correlated with the results obtained by Fourier Transform IR SE (FTIRSE) measurements. Postgrowth annealing experiments were performed in an ultra-high vacuum (UHV) chamber, up to 900 degrees C. The film modifications and the nitrogen evolution, were monitored in real-time using an ultra-fast 16-wavelength ellipsometer and a quadropole mass spectrometer (QMS). In situ SE and FTIRSE measurements were also obtained on the completion of annealing. The nitrogen evolution is correlated with the carbon-nitrogen bonding and the compositional modifications in the films, as derived by FTIRSE and SE. (C) 2000 Elsevier Science S.A. All rights reserved. | en |
| heal.access | campus | - |
| heal.fullTextAvailability | TRUE | - |
| heal.identifier.primary | Doi 10.1016/S0257-8972(99)00575-7 | - |
| heal.identifier.secondary | <Go to ISI>://000085945600053 | - |
| heal.journalName | Surface & Coatings Technology | en |
| heal.journalType | peer reviewed | - |
| heal.language | en | - |
| heal.publicationDate | 2000 | - |
| heal.publisher | Elsevier | en |
| heal.recordProvider | Πανεπιστήμιο Ιωαννίνων. Σχολή Θετικών Επιστημών. Τμήμα Μηχανικών Επιστήμης Υλικών | el |
| heal.type | journalArticle | - |
| heal.type.el | Άρθρο Περιοδικού | el |
| heal.type.en | Journal article | en |
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