Flow Phenomena in Chemical Vapor-Deposition of Thin-Films
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Date
Authors
Jensen, K. F.
Einset, E. O.
Fotiadis, D. I.
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Abstract
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Type of the conference item
Journal type
peer reviewed
Educational material type
Conference Name
Journal name
Annual Review of Fluid Mechanics
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Alternative title / Subtitle
Description
Description
Keywords
mixed convection, double-diffusive phenomena, thermal and solutal convection, finite-element flow simulations, materials processing, horizontal mocvd reactors, monte-carlo simulation, growth-rate uniformity, rotating-disk, transport phenomena, mass-transfer, gas-phase, directional solidification, thermal-convection, mathematical-model
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Citation
Link
<Go to ISI>://A1991ET75000009
Language
en
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Πανεπιστήμιο Ιωαννίνων. Σχολή Θετικών Επιστημών. Τμήμα Μηχανικών Επιστήμης Υλικών