Polycrystalline diamond formation by post-growth ion bombardment of sputter-deposited amorphous carbon films
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Date
Authors
Patsalas, P.
Logothetidis, S.
Douka, P.
Gioti, M.
Stergioudis, G.
Komninou, P.
Nouet, G.
Karakostas, T.
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Pergamon-Elsevier
Abstract
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Type of the conference item
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peer reviewed
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Journal name
Carbon
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Description
Post-growth Ar+ ion beam bombardment (IBB) of amorphous carbon (a-C) films on Si, with energies above 1 keV, induces several structural modifications in the films, including the formation of diamond, graphite and SIC grains. X-ray diffraction (in both conventional and grazing incidence geometry) and high resolution electron microscopy were used to study the structure of the as grown films and the phases - with emphasis to diamond - that resulted after IBB. The a-C films morphology and density were also studied by X-ray reflectivity and show an increase in film density upon IBB. (C) 1999 Elsevier Science Ltd All rights reserved.
Description
Keywords
diamond, plasma sputtering, electron microscopy, x-ray diffraction, microstructure, spectroscopic ellipsometry, beam bombardment, transformation, thickness, coatings, phase
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<Go to ISI>://000080216000029
Language
en
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Πανεπιστήμιο Ιωαννίνων. Σχολή Θετικών Επιστημών. Τμήμα Μηχανικών Επιστήμης Υλικών