Polycrystalline diamond formation by post-growth ion bombardment of sputter-deposited amorphous carbon films

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dc.contributor.authorPatsalas, P.en
dc.contributor.authorLogothetidis, S.en
dc.contributor.authorDouka, P.en
dc.contributor.authorGioti, M.en
dc.contributor.authorStergioudis, G.en
dc.contributor.authorKomninou, P.en
dc.contributor.authorNouet, G.en
dc.contributor.authorKarakostas, T.en
dc.date.accessioned2015-11-24T17:37:24Z
dc.date.available2015-11-24T17:37:24Z
dc.identifier.issn0008-6223-
dc.identifier.urihttps://olympias.lib.uoi.gr/jspui/handle/123456789/14350
dc.rightsDefault Licence-
dc.subjectdiamonden
dc.subjectplasma sputteringen
dc.subjectelectron microscopyen
dc.subjectx-ray diffractionen
dc.subjectmicrostructureen
dc.subjectspectroscopic ellipsometryen
dc.subjectbeam bombardmenten
dc.subjecttransformationen
dc.subjectthicknessen
dc.subjectcoatingsen
dc.subjectphaseen
dc.titlePolycrystalline diamond formation by post-growth ion bombardment of sputter-deposited amorphous carbon filmsen
heal.abstractPost-growth Ar+ ion beam bombardment (IBB) of amorphous carbon (a-C) films on Si, with energies above 1 keV, induces several structural modifications in the films, including the formation of diamond, graphite and SIC grains. X-ray diffraction (in both conventional and grazing incidence geometry) and high resolution electron microscopy were used to study the structure of the as grown films and the phases - with emphasis to diamond - that resulted after IBB. The a-C films morphology and density were also studied by X-ray reflectivity and show an increase in film density upon IBB. (C) 1999 Elsevier Science Ltd All rights reserved.en
heal.accesscampus-
heal.fullTextAvailabilityTRUE-
heal.identifier.primaryDoi 10.1016/S0008-6223(98)00287-5-
heal.identifier.secondary<Go to ISI>://000080216000029-
heal.journalNameCarbonen
heal.journalTypepeer reviewed-
heal.languageen-
heal.publicationDate1999-
heal.publisherPergamon-Elsevieren
heal.recordProviderΠανεπιστήμιο Ιωαννίνων. Σχολή Θετικών Επιστημών. Τμήμα Μηχανικών Επιστήμης Υλικώνel
heal.typejournalArticle-
heal.type.elΆρθρο Περιοδικούel
heal.type.enJournal articleen

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