Tetragonal or monoclinic ZrO2 thin films from Zr-based glassy templates

dc.contributor.authorPanagiotopoulos, N. T.en
dc.contributor.authorKovac, J.en
dc.contributor.authorCvelbar, U.en
dc.contributor.authorPatsalas, P.en
dc.contributor.authorMozetic, M.en
dc.contributor.authorEvangelakis, G. A.en
dc.date.accessioned2015-11-24T17:39:20Z
dc.date.available2015-11-24T17:39:20Z
dc.identifier.issn0734-2101-
dc.identifier.urihttps://olympias.lib.uoi.gr/jspui/handle/123456789/14632
dc.rightsDefault Licence-
dc.subjectbulk metallic-glassen
dc.subjectyttria-stabilized zirconiaen
dc.subjectoxidation behavioren
dc.subjectoptical-propertiesen
dc.subjectamorphous-alloysen
dc.subjectnanocrystalsen
dc.subjectdepositionen
dc.subjectsurfaceen
dc.subjectplasmaen
dc.subjectgrowthen
dc.titleTetragonal or monoclinic ZrO2 thin films from Zr-based glassy templatesen
heal.abstractThe authors report on the selective formation of pure tetragonal or mixed tetragonal-monoclinic ZrO2 films by means of post-growth oxygen plasma treatment of Zr-based Zr-Cu ternary or quaternary metallic glassy (MG) films containing minor additions of Al, Ti, and Si. It came out that the choice of the third and/or fourth element in the MG template, in conjunction with oxygen plasma conditions and treatment time, determine the crystal structure and the surface morphology of the ZrO2 films. The authors found that the oxidation of the Zr-Cu MG template resulted in mixed tetragonal-monoclinic ZrO2 film with rather rough surface, whereas in the case of Al additions smooth surfaces of pure tetragonal or mixed tetragonal-monoclinic ZrO2 films were grown after short and long treatment times, respectively. In addition, oxygen plasma treatment of MG templates containing Ti and/or Si minor additions resulted in mixed tetragonal-monoclinic ZrO2 films, the doping element and the treatment times adjusting besides the concentration of each phase also the surface morphologies, which can vary from cones, in the case of Ti addition, to nanosponge and completely rough structures in Si ternary and Si/Ti quaternary systems, respectively. These findings suggest a quick, amenable, and low cost method of two-step industrial scale processing for selective growth of tetragonal and/or monoclinic ZrO2 with specific surface morphology. (C) 2012 American Vacuum Society. [http://dx.doi.org/10.1116/1.4742258]en
heal.accesscampus-
heal.fullTextAvailabilityTRUE-
heal.identifier.primaryDoi 10.1116/1.4742258-
heal.identifier.secondary<Go to ISI>://000308404900030-
heal.journalNameJournal of Vacuum Science & Technology Aen
heal.journalTypepeer reviewed-
heal.languageen-
heal.publicationDate2012-
heal.publisherAmerican Vacuum Societyen
heal.recordProviderΠανεπιστήμιο Ιωαννίνων. Σχολή Θετικών Επιστημών. Τμήμα Μηχανικών Επιστήμης Υλικώνel
heal.typejournalArticle-
heal.type.elΆρθρο Περιοδικούel
heal.type.enJournal articleen

Αρχεία

Φάκελος/Πακέτο αδειών

Προβολή: 1 - 1 of 1
Φόρτωση...
Μικρογραφία εικόνας
Ονομα:
license.txt
Μέγεθος:
1.74 KB
Μορφότυπο:
Item-specific license agreed upon to submission
Περιγραφή: