In situ and real-time ellipsometry monitoring of submicron titanium nitride/titanium silicide electronic devices
| dc.contributor.author | Patsalas, P. | en |
| dc.contributor.author | Charitidis, C. | en |
| dc.contributor.author | Logothetidis, S. | en |
| dc.date.accessioned | 2015-11-24T17:34:52Z | |
| dc.date.available | 2015-11-24T17:34:52Z | |
| dc.identifier.issn | 0169-4332 | - |
| dc.identifier.uri | https://olympias.lib.uoi.gr/jspui/handle/123456789/14046 | |
| dc.rights | Default Licence | - |
| dc.subject | titanium nitride | en |
| dc.subject | titanium silicide | en |
| dc.subject | optical properties | en |
| dc.subject | spectroscopic ellipsometry | en |
| dc.subject | microstructure | en |
| dc.subject | films | en |
| dc.subject | contacts | en |
| dc.subject | nitride | en |
| dc.title | In situ and real-time ellipsometry monitoring of submicron titanium nitride/titanium silicide electronic devices | en |
| heal.abstract | We fabricated Al/TiNx/(Ti/Si) x 15/Si(100) submicron devices by magnetron sputtering. Spectroscopic Ellipsometry (SE) was used for in situ characterization of TIN,, Ti and Si layers. The intermixing of Ti/Si layers and the phase transformations of TiSi during annealing were monitored by Kinetic Ellipsometry (KE). The metallic behavior of the TiNx layers was studied by analyzing their dielectric function in the IR region, measured by Fourier Transform InfraRed Spectroscopic Ellipsometry (FTIRSE), and by the unscreened plasma energy ((h) over bar omega(pu)) calculated by SE data analysis. (C) 2000 Elsevier Science B.V. All rights reserved. | en |
| heal.access | campus | - |
| heal.fullTextAvailability | TRUE | - |
| heal.identifier.primary | Doi 10.1016/S0169-4332(99)00444-4 | - |
| heal.identifier.secondary | <Go to ISI>://000086060500042 | - |
| heal.journalName | Applied Surface Science | en |
| heal.journalType | peer reviewed | - |
| heal.language | en | - |
| heal.publicationDate | 2000 | - |
| heal.publisher | Elsevier | en |
| heal.recordProvider | Πανεπιστήμιο Ιωαννίνων. Σχολή Θετικών Επιστημών. Τμήμα Μηχανικών Επιστήμης Υλικών | el |
| heal.type | journalArticle | - |
| heal.type.el | Άρθρο Περιοδικού | el |
| heal.type.en | Journal article | en |
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