Investigation of deep implanted fluorine channeling profiles in silicon using resonant NRA

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dc.contributor.authorKokkoris, M.en
dc.contributor.authorPerdikakis, G.en
dc.contributor.authorVlastou, R.en
dc.contributor.authorPapadopoulos, C. T.en
dc.contributor.authorAslanoglou, X. A.en
dc.contributor.authorPosselt, M.en
dc.contributor.authorGrotzschel, R.en
dc.contributor.authorHarissopulos, S.en
dc.contributor.authorKossionides, S.en
dc.date.accessioned2015-11-24T18:26:44Z
dc.date.available2015-11-24T18:26:44Z
dc.identifier.issn0168-583X-
dc.identifier.urihttps://olympias.lib.uoi.gr/jspui/handle/123456789/15940
dc.rightsDefault Licence-
dc.subjecthigh-energy implantationen
dc.subjectchannelingen
dc.subjectnuclear resonanceen
dc.subjectfluorine profilingen
dc.subjectresonant nraen
dc.subjectc-trimen
dc.subjectnuclear-reactionsen
dc.subjection-implantationen
dc.subjectdefect productionen
dc.subjectheavy-ionsen
dc.subjectdamageen
dc.titleInvestigation of deep implanted fluorine channeling profiles in silicon using resonant NRAen
heal.abstractSi(100) and (111) crystals were irradiated in the random as well as in the channeling direction, using 5 MeV F-19(+) ions, to a maximum fluence of approximately 1 x 10(17) particles/cm(2). The occurring deep implanted profiles were subsequently investigated using the Resonant Nuclear Reaction Analysis technique in the energy range E-p = 950-1200 keV. The reaction F-19(p, alphay)O-16 reaction exhibits a strong resonant behavior in the above mentioned energy range, thus providing an excellent tool for the depth profiling of fluorine, yielding minimum detection limits of the order of a few ppm. The occurring profiles are analyzed with SRIM and c-TRIM codes and an attempt is made to explain the characteristics of the experimental spectra, as well as to compare with results already existing in literature. (C) 2003 Elsevier Science B.V. All rights reserved.en
heal.accesscampus-
heal.fullTextAvailabilityTRUE-
heal.identifier.primaryDoi 10.1016/S0168-583x(03)00448-8-
heal.identifier.secondary<Go to ISI>://000182039000011-
heal.identifier.secondaryhttp://ac.els-cdn.com/S0168583X03004488/1-s2.0-S0168583X03004488-main.pdf?_tid=fced648e240081e086af3966e751d0ed&acdnat=1334134424_a8adaed3a13e6093e0944c2e733180b5-
heal.journalNameNuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atomsen
heal.journalTypepeer reviewed-
heal.languageen-
heal.publicationDate2003-
heal.recordProviderΠανεπιστήμιο Ιωαννίνων. Σχολή Επιστημών και Τεχνολογιών. Τμήμα Βιολογικών Εφαρμογών και Τεχνολογιώνel
heal.typejournalArticle-
heal.type.elΆρθρο Περιοδικούel
heal.type.enJournal articleen

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