Layer-by-layer UV micromachining methodology of epoxy resist embedded microchannels
| dc.contributor.author | Kitsara, M. | en |
| dc.contributor.author | Chatzichristidi, M. | en |
| dc.contributor.author | Niakoula, D. | en |
| dc.contributor.author | Goustouridis, D. | en |
| dc.contributor.author | Beltsios, K. | en |
| dc.contributor.author | Argitis, P. | en |
| dc.contributor.author | Raptis, I. | en |
| dc.date.accessioned | 2015-11-24T17:35:20Z | |
| dc.date.available | 2015-11-24T17:35:20Z | |
| dc.identifier.issn | 0167-9317 | - |
| dc.identifier.uri | https://olympias.lib.uoi.gr/jspui/handle/123456789/14113 | |
| dc.rights | Default Licence | - |
| dc.subject | embedded microchannels | en |
| dc.subject | epoxy resist | en |
| dc.subject | uv lithography | en |
| dc.subject | micro-channels | en |
| dc.subject | fabrication | en |
| dc.title | Layer-by-layer UV micromachining methodology of epoxy resist embedded microchannels | en |
| heal.abstract | A novel layer-by-layer fabrication approach for the manufacturing of long embedded microchannels is presented. The methodology is based on the use of two epoxy based photoresist layers with different photo acid generator (PAG) concentration. Using this methodology long, functional microchannels are demonstrated. The technology has been optimized through tuning of the epoxy molecular weight, PAG concentrations and processing conditions. Finally, a basic microfluidic application is presented. (c) 2006 Elsevier B.V. All rights reserved. | en |
| heal.access | campus | - |
| heal.fullTextAvailability | TRUE | - |
| heal.identifier.primary | DOI 10.1016/j.mee.2006.01.157 | - |
| heal.identifier.secondary | <Go to ISI>://000237581900162 | - |
| heal.identifier.secondary | http://ac.els-cdn.com/S0167931706001031/1-s2.0-S0167931706001031-main.pdf?_tid=29a5a8629e67ef735b7acbfc9ca2885c&acdnat=1339662561_8f52e068d74242340a2dd4a3162b2916 | - |
| heal.journalName | Microelectronic Engineering | en |
| heal.journalType | peer reviewed | - |
| heal.language | en | - |
| heal.publicationDate | 2006 | - |
| heal.publisher | Elsevier | en |
| heal.recordProvider | Πανεπιστήμιο Ιωαννίνων. Σχολή Θετικών Επιστημών. Τμήμα Μηχανικών Επιστήμης Υλικών | el |
| heal.type | journalArticle | - |
| heal.type.el | Άρθρο Περιοδικού | el |
| heal.type.en | Journal article | en |
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