Fabrication of conductometric chemical sensors by photolithography of conductive polymer composites

dc.contributor.authorAndreadis, N.en
dc.contributor.authorChatzandroulis, S.en
dc.contributor.authorGoustouridis, D.en
dc.contributor.authorKosma, V.en
dc.contributor.authorBeltsios, K.en
dc.contributor.authorRaptis, I.en
dc.date.accessioned2015-11-24T17:34:14Z
dc.date.available2015-11-24T17:34:14Z
dc.identifier.issn0167-9317-
dc.identifier.urihttps://olympias.lib.uoi.gr/jspui/handle/123456789/13943
dc.rightsDefault Licence-
dc.subjectchemical sensorsen
dc.subjectpolymer depositionen
dc.subjectconductive polymer compositesen
dc.subjectlithographyen
dc.subjectblacken
dc.titleFabrication of conductometric chemical sensors by photolithography of conductive polymer compositesen
heal.abstractA new approach based on photolithographic processes for the fabrication of conductive polymer chemical sensors is described. The process was successfully applied in polymer/carbon black composites of the negative tone EPR and PDMS, and allows for the exact positioning and patterning of the composite polymer over the electrodes. On the other hand, patterning of a positive tone composite (PMMA) proved unsuccessful for a wide range of exposure doses and developer schemes. Responses to the absorption of selected vapors with emphasis on the EPR/carbon black system are reported. (c) 2007 Elsevier B.V. All rights reserved.en
heal.accesscampus-
heal.fullTextAvailabilityTRUE-
heal.identifier.primaryDOI 10.1016/j.mee.2007.01.050-
heal.identifier.secondary<Go to ISI>://000247182500122-
heal.identifier.secondaryhttp://ac.els-cdn.com/S0167931707001311/1-s2.0-S0167931707001311-main.pdf?_tid=f4f8510e77b3225edb33cf048d050aee&acdnat=1339662541_6f46dd9e933639a17b1b5d6b562f18b1-
heal.journalNameMicroelectronic Engineeringen
heal.journalTypepeer reviewed-
heal.languageen-
heal.publicationDate2007-
heal.publisherElsevieren
heal.recordProviderΠανεπιστήμιο Ιωαννίνων. Σχολή Θετικών Επιστημών. Τμήμα Μηχανικών Επιστήμης Υλικώνel
heal.typejournalArticle-
heal.type.elΆρθρο Περιοδικούel
heal.type.enJournal articleen

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