Fabrication of conductometric chemical sensors by photolithography of conductive polymer composites
dc.contributor.author | Andreadis, N. | en |
dc.contributor.author | Chatzandroulis, S. | en |
dc.contributor.author | Goustouridis, D. | en |
dc.contributor.author | Kosma, V. | en |
dc.contributor.author | Beltsios, K. | en |
dc.contributor.author | Raptis, I. | en |
dc.date.accessioned | 2015-11-24T17:34:14Z | |
dc.date.available | 2015-11-24T17:34:14Z | |
dc.identifier.issn | 0167-9317 | - |
dc.identifier.uri | https://olympias.lib.uoi.gr/jspui/handle/123456789/13943 | |
dc.rights | Default Licence | - |
dc.subject | chemical sensors | en |
dc.subject | polymer deposition | en |
dc.subject | conductive polymer composites | en |
dc.subject | lithography | en |
dc.subject | black | en |
dc.title | Fabrication of conductometric chemical sensors by photolithography of conductive polymer composites | en |
heal.abstract | A new approach based on photolithographic processes for the fabrication of conductive polymer chemical sensors is described. The process was successfully applied in polymer/carbon black composites of the negative tone EPR and PDMS, and allows for the exact positioning and patterning of the composite polymer over the electrodes. On the other hand, patterning of a positive tone composite (PMMA) proved unsuccessful for a wide range of exposure doses and developer schemes. Responses to the absorption of selected vapors with emphasis on the EPR/carbon black system are reported. (c) 2007 Elsevier B.V. All rights reserved. | en |
heal.access | campus | - |
heal.fullTextAvailability | TRUE | - |
heal.identifier.primary | DOI 10.1016/j.mee.2007.01.050 | - |
heal.identifier.secondary | <Go to ISI>://000247182500122 | - |
heal.identifier.secondary | http://ac.els-cdn.com/S0167931707001311/1-s2.0-S0167931707001311-main.pdf?_tid=f4f8510e77b3225edb33cf048d050aee&acdnat=1339662541_6f46dd9e933639a17b1b5d6b562f18b1 | - |
heal.journalName | Microelectronic Engineering | en |
heal.journalType | peer reviewed | - |
heal.language | en | - |
heal.publicationDate | 2007 | - |
heal.publisher | Elsevier | en |
heal.recordProvider | Πανεπιστήμιο Ιωαννίνων. Σχολή Θετικών Επιστημών. Τμήμα Μηχανικών Επιστήμης Υλικών | el |
heal.type | journalArticle | - |
heal.type.el | Άρθρο Περιοδικού | el |
heal.type.en | Journal article | en |
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