Nanomechanical properties of multilayered amorphous carbon structures
Φόρτωση...
Ημερομηνία
Συγγραφείς
Mathioudakis, C.
Kelires, P. C.
Panagiotatos, Y.
Patsalas, P.
Charitidis, C.
Logothetidis, S.
Τίτλος Εφημερίδας
Περιοδικό ISSN
Τίτλος τόμου
Εκδότης
American Physical Society
Περίληψη
Τύπος
Είδος δημοσίευσης σε συνέδριο
Είδος περιοδικού
peer reviewed
Είδος εκπαιδευτικού υλικού
Όνομα συνεδρίου
Όνομα περιοδικού
Physical Review B
Όνομα βιβλίου
Σειρά βιβλίου
Έκδοση βιβλίου
Συμπληρωματικός/δευτερεύων τίτλος
Περιγραφή
A possible route toward reducing the intrinsic compressive stress in as-grown amorphous carbon films on Si substrates, with a high fraction of tetrahedral bonding, is by forming multilayered a-C structures composed of layers dense and rich in sp(3) sites alternated by layers rich in sp(2) geometries, a type of an amorphous superlattice. We present here a combined theoretical and experimental effort to investigate the stability, stress, and elastic properties of this type of a-C material. Our theoretical approach is based on Monte Carlo simulations within an empirical potential scheme, while the experimental part consists of spectroscopic ellipsometry, x-ray reflectivity, stress, and nanoindentation measurements in films prepared by magnetron sputtering. Our central result is that the average stress in the multilayered structures is nearly eliminated through layer-by-layer stress compensation, yet the fraction of sp(3) sites in the dense regions remains high, sustained by the overwhelmingly compressive local stresses. The sp(3)-rich layers are stable both against a moderate increase of the width of the low-density layers, as well as under thermal annealing. The elastic moduli of the multilayered films are comparable with those of single-layer films. This, in conjuction with their low stress, makes them suitable for mechanical purposes.
Περιγραφή
Λέξεις-κλειδιά
cross-sectional structure, stress-induced formation, diamond-like-carbon, x-ray reflectivity, thin-films, molecular-dynamics, elastic properties, intrinsic stress, electronic-properties, compressive-stress
Θεματική κατηγορία
Παραπομπή
Σύνδεσμος
<Go to ISI>://000176066600049
Γλώσσα
en
Εκδίδον τμήμα/τομέας
Όνομα επιβλέποντος
Εξεταστική επιτροπή
Γενική Περιγραφή / Σχόλια
Ίδρυμα και Σχολή/Τμήμα του υποβάλλοντος
Πανεπιστήμιο Ιωαννίνων. Σχολή Θετικών Επιστημών. Τμήμα Μηχανικών Επιστήμης Υλικών