Nanomechanical properties of multilayered amorphous carbon structures
| dc.contributor.author | Mathioudakis, C. | en |
| dc.contributor.author | Kelires, P. C. | en |
| dc.contributor.author | Panagiotatos, Y. | en |
| dc.contributor.author | Patsalas, P. | en |
| dc.contributor.author | Charitidis, C. | en |
| dc.contributor.author | Logothetidis, S. | en |
| dc.date.accessioned | 2015-11-24T17:36:24Z | |
| dc.date.available | 2015-11-24T17:36:24Z | |
| dc.identifier.issn | 1098-0121 | - |
| dc.identifier.uri | https://olympias.lib.uoi.gr/jspui/handle/123456789/14243 | |
| dc.rights | Default Licence | - |
| dc.subject | cross-sectional structure | en |
| dc.subject | stress-induced formation | en |
| dc.subject | diamond-like-carbon | en |
| dc.subject | x-ray reflectivity | en |
| dc.subject | thin-films | en |
| dc.subject | molecular-dynamics | en |
| dc.subject | elastic properties | en |
| dc.subject | intrinsic stress | en |
| dc.subject | electronic-properties | en |
| dc.subject | compressive-stress | en |
| dc.title | Nanomechanical properties of multilayered amorphous carbon structures | en |
| heal.abstract | A possible route toward reducing the intrinsic compressive stress in as-grown amorphous carbon films on Si substrates, with a high fraction of tetrahedral bonding, is by forming multilayered a-C structures composed of layers dense and rich in sp(3) sites alternated by layers rich in sp(2) geometries, a type of an amorphous superlattice. We present here a combined theoretical and experimental effort to investigate the stability, stress, and elastic properties of this type of a-C material. Our theoretical approach is based on Monte Carlo simulations within an empirical potential scheme, while the experimental part consists of spectroscopic ellipsometry, x-ray reflectivity, stress, and nanoindentation measurements in films prepared by magnetron sputtering. Our central result is that the average stress in the multilayered structures is nearly eliminated through layer-by-layer stress compensation, yet the fraction of sp(3) sites in the dense regions remains high, sustained by the overwhelmingly compressive local stresses. The sp(3)-rich layers are stable both against a moderate increase of the width of the low-density layers, as well as under thermal annealing. The elastic moduli of the multilayered films are comparable with those of single-layer films. This, in conjuction with their low stress, makes them suitable for mechanical purposes. | en |
| heal.access | campus | - |
| heal.fullTextAvailability | TRUE | - |
| heal.identifier.primary | Doi 10.1103/Physrevb.65.205203 | - |
| heal.identifier.secondary | <Go to ISI>://000176066600049 | - |
| heal.journalName | Physical Review B | en |
| heal.journalType | peer reviewed | - |
| heal.language | en | - |
| heal.publicationDate | 2002 | - |
| heal.publisher | American Physical Society | en |
| heal.recordProvider | Πανεπιστήμιο Ιωαννίνων. Σχολή Θετικών Επιστημών. Τμήμα Μηχανικών Επιστήμης Υλικών | el |
| heal.type | journalArticle | - |
| heal.type.el | Άρθρο Περιοδικού | el |
| heal.type.en | Journal article | en |
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