Formation of 2-D arrays of semiconductor nanocrystals or semiconductor-rich nanolayers by very low-energy Si or Ge ion implantation in silicon oxide films

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dc.contributor.authorNormand, P.en
dc.contributor.authorBeltsios, K.en
dc.contributor.authorKapetanakis, E.en
dc.contributor.authorTsoukalas, D.en
dc.contributor.authorTravlos, T.en
dc.contributor.authorStoemenos, J.en
dc.contributor.authorVan Den Berg, J.en
dc.contributor.authorZhang, S.en
dc.contributor.authorVieu, C.en
dc.contributor.authorLaunois, H.en
dc.contributor.authorGautier, J.en
dc.contributor.authorJourdan, F.en
dc.contributor.authorPalun, L.en
dc.date.accessioned2015-11-24T17:34:27Z
dc.date.available2015-11-24T17:34:27Z
dc.identifier.issn0168-583X-
dc.identifier.urihttps://olympias.lib.uoi.gr/jspui/handle/123456789/13970
dc.rightsDefault Licence-
dc.subjectsien
dc.subjectgeen
dc.subjectimplantationen
dc.subjectsio2en
dc.subjectnanocrystalsen
dc.subjectglass transitionen
dc.titleFormation of 2-D arrays of semiconductor nanocrystals or semiconductor-rich nanolayers by very low-energy Si or Ge ion implantation in silicon oxide filmsen
heal.abstractThe structure evolution of annealed low-energy Si- or Ge-implanted thin and thick SiO2 layers is studied. The majority of Si (or Ge) species is restricted within a 3-4 nm thick layer. Si is able to separate and crystallize more easily than Ge. The glass transition temperature of the as-implanted structure has a significant effect on the progress of phase transformations accompanying annealing. (C) 2001 Elsevier Science B.V. All rights reserved.en
heal.accesscampus-
heal.fullTextAvailabilityTRUE-
heal.identifier.secondary<Go to ISI>://000169403700011-
heal.journalNameNuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atomsen
heal.journalTypepeer reviewed-
heal.languageen-
heal.publicationDate2001-
heal.publisherElsevieren
heal.recordProviderΠανεπιστήμιο Ιωαννίνων. Σχολή Θετικών Επιστημών. Τμήμα Μηχανικών Επιστήμης Υλικώνel
heal.typejournalArticle-
heal.type.elΆρθρο Περιοδικούel
heal.type.enJournal articleen

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