Surface and interface morphology and structure of amorphous carbon thin and multilayer films
dc.contributor.author | Patsalas, P. | en |
dc.contributor.author | Logothetidis, S. | en |
dc.contributor.author | Kelires, P. C. | en |
dc.date.accessioned | 2015-11-24T17:38:50Z | |
dc.date.available | 2015-11-24T17:38:50Z | |
dc.identifier.issn | 0925-9635 | - |
dc.identifier.uri | https://olympias.lib.uoi.gr/jspui/handle/123456789/14559 | |
dc.rights | Default Licence | - |
dc.subject | amorphous carbon | en |
dc.subject | surface characterization | en |
dc.subject | interface structure | en |
dc.subject | ion assisted deposition | en |
dc.subject | diamond-like-carbon | en |
dc.subject | x-ray-reflectivity | en |
dc.subject | cross-sectional structure | en |
dc.subject | atomic-force microscopy | en |
dc.subject | deposition mechanism | en |
dc.subject | hydrogenated carbon | en |
dc.subject | molecular-dynamics | en |
dc.subject | elastic properties | en |
dc.subject | stress-relaxation | en |
dc.subject | layered materials | en |
dc.title | Surface and interface morphology and structure of amorphous carbon thin and multilayer films | en |
heal.abstract | We review the implementation of X-ray reflection (reflectivity and scattering) techniques for the study of amorphous Carbon (a-C, a-C:H, ta-C) thin and multilayer films and in particular in the determination of the film density and surface and interface morphology, which are intrinsically significant for ultra-thin films. We present studies of various a-C and a-C:H films, which include in particular: i) the morphology of a-C/Si interface, ii) the surface morphology and density evolution during sputter growth of a-C, iii) the morphology of the sp(2) -rich a-C/sp(3)- rich a-C interfaces in multilayer a-C films, iv) the universal correlation between the film density and the refractive index of a-C and a-C:H films. We also compare and validate the experimental results with relative results from Monte-Carlo simulations within an empirical potential scheme. The computational results shed light on the atomistic mechanisms determining the structure and morphology of the a-C interfaces between individual sp(2)- and sp(3) -rich a-C layers and between a-C and Si substrates. (c) 2005 Elsevier B.V. All rights reserved. | en |
heal.access | campus | - |
heal.fullTextAvailability | TRUE | - |
heal.identifier.primary | DOI 10.1016/j.diamond.2004.12.039 | - |
heal.identifier.secondary | <Go to ISI>://000230064000004 | - |
heal.identifier.secondary | http://ac.els-cdn.com/S0925963505000026/1-s2.0-S0925963505000026-main.pdf?_tid=3cc545c63fbe5a31d4b914d6bbbbd7ea&acdnat=1339755917_2539f6206dec34d764e2fb451255f150 | - |
heal.journalName | Diamond and Related Materials | en |
heal.journalType | peer reviewed | - |
heal.language | en | - |
heal.publicationDate | 2005 | - |
heal.publisher | Elsevier | en |
heal.recordProvider | Πανεπιστήμιο Ιωαννίνων. Σχολή Θετικών Επιστημών. Τμήμα Μηχανικών Επιστήμης Υλικών | el |
heal.type | journalArticle | - |
heal.type.el | Άρθρο Περιοδικού | el |
heal.type.en | Journal article | en |
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