Conducting transition metal nitride thin films with tailored cell sizes: The case of delta-Ti(x)Ta(1-x)N
| dc.contributor.author | Koutsokeras, L. E. | en |
| dc.contributor.author | Abadias, G. | en |
| dc.contributor.author | Lekka, C. E. | en |
| dc.contributor.author | Matenoglou, G. M. | en |
| dc.contributor.author | Anagnostopoulos, D. F. | en |
| dc.contributor.author | Evangelakis, G. A. | en |
| dc.contributor.author | Patsalas, P. | en |
| dc.date.accessioned | 2015-11-24T17:32:42Z | |
| dc.date.available | 2015-11-24T17:32:42Z | |
| dc.identifier.issn | 0003-6951 | - |
| dc.identifier.uri | https://olympias.lib.uoi.gr/jspui/handle/123456789/13771 | |
| dc.rights | Default Licence | - |
| dc.subject | preferred orientation | en |
| dc.subject | copper metallization | en |
| dc.subject | optical-properties | en |
| dc.subject | evolution | en |
| dc.subject | tan | en |
| dc.subject | microstructure | en |
| dc.subject | contacts | en |
| dc.subject | stress | en |
| dc.subject | growth | en |
| dc.subject | energy | en |
| dc.title | Conducting transition metal nitride thin films with tailored cell sizes: The case of delta-Ti(x)Ta(1-x)N | en |
| heal.abstract | We present results on the stability and tailoring of the cell size of conducting delta-Ti(x)Ta(1-x)N obtained by film growth and ab initio calculations. Despite the limited solubility of Ta in Ti, we show that TiN and TaN are soluble due to the hybrization of the d and sp electrons of the metal and N, respectively, that stabilizes the ternary system to the rocksalt structure. The stress-free cell sizes follow the Vegard's rule; nevertheless, process-dependent stresses expand the cell size of the as-grown films. The electronic properties of delta-Ti(x)Ta(1-x)N films (p=180 Omega cm) are similar to those of TiN and TaN. (c) 2008 American Institute of Physics. | en |
| heal.access | campus | - |
| heal.fullTextAvailability | TRUE | - |
| heal.identifier.primary | Doi 10.1063/1.2955838 | - |
| heal.identifier.secondary | <Go to ISI>://000258184600019 | - |
| heal.journalName | Applied Physics Letters | en |
| heal.journalType | peer reviewed | - |
| heal.language | en | - |
| heal.publicationDate | 2008 | - |
| heal.publisher | American Institute of Physics | en |
| heal.recordProvider | Πανεπιστήμιο Ιωαννίνων. Σχολή Θετικών Επιστημών. Τμήμα Μηχανικών Επιστήμης Υλικών | el |
| heal.type | journalArticle | - |
| heal.type.el | Άρθρο Περιοδικού | el |
| heal.type.en | Journal article | en |