Hybrid pulsed laser deposition of ti-cu-n ternary nitride thin films
| dc.contributor.author | Matenoglou, G. M. | en |
| dc.contributor.author | Evangelakis, G. A. | en |
| dc.contributor.author | Kosmidis, C. | en |
| dc.contributor.author | Patsalas, P. | en |
| dc.date.accessioned | 2015-11-24T18:27:17Z | |
| dc.date.available | 2015-11-24T18:27:17Z | |
| dc.identifier.issn | 1606-5131 | - |
| dc.identifier.uri | https://olympias.lib.uoi.gr/jspui/handle/123456789/16009 | |
| dc.rights | Default Licence | - |
| dc.subject | mechanical-properties | en |
| dc.subject | coatings | en |
| dc.subject | copper | en |
| dc.title | Hybrid pulsed laser deposition of ti-cu-n ternary nitride thin films | en |
| heal.abstract | In this work we present the growth of Ti-Cu-N ternary films by a hybrid Pulsed Laser Deposition (PLD) process. In the configuration used, the metal source was a composite Ti-Cu target, which was ablated by a high-fluence Nd:YAG laser (2nd harmonic, lambda=532 nm) in a flowing N-2. The process was carried out in a homogeneous electric field with the substrate being at a negative DC potential (bias voltage V-b=-50 V) with respect to the ablation target. Films with the typical gold-like appearance of TiN were grown at P-N2 similar to 10(-1) Pa. The effects of P-N2 to the Metal/N ratio and Ti/Cu ratio into the films, as well as the crystal structure of the films were studied employing Auger Electron Spectroscopy (AES) and X-Ray Diffraction (XRD), respectively. The films were found to consist of nanocrystalline TiN and amorphous Cu. Cu did not crystallize even in the Curich films. The N was found to be bonded exclusively with Ti. | en |
| heal.access | campus | - |
| heal.fullTextAvailability | TRUE | - |
| heal.identifier.secondary | <Go to ISI>://000250547100007 | - |
| heal.journalName | Reviews on Advanced Materials Science | en |
| heal.journalType | peer reviewed | - |
| heal.language | en | - |
| heal.publicationDate | 2007 | - |
| heal.recordProvider | Πανεπιστήμιο Ιωαννίνων. Σχολή Επιστημών και Τεχνολογιών. Τμήμα Βιολογικών Εφαρμογών και Τεχνολογιών | el |
| heal.type | journalArticle | - |
| heal.type.el | Άρθρο Περιοδικού | el |
| heal.type.en | Journal article | en |
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