Characterization of magnetron sputtering deposited thin films of TiN for use as a metal electrode on TiN/SiO2/Si metal-oxide-semiconductor devices

Απλή σελίδα τεκμηρίου
dc.contributor.authorEvangelou, E. K.en
dc.contributor.authorKonofaos, N.en
dc.contributor.authorAslanoglou, X. A.en
dc.contributor.authorDimitriadis, C. A.en
dc.contributor.authorPatsalas, P.en
dc.contributor.authorLogothetidis, S.en
dc.contributor.authorKokkoris, M.en
dc.contributor.authorKossionides, E.en
dc.contributor.authorVlastou, R.en
dc.contributor.authorGroetschel, R.en
dc.date.accessioned2015-11-24T17:32:30Z
dc.date.available2015-11-24T17:32:30Z
dc.identifier.issn0021-8979-
dc.identifier.urihttps://olympias.lib.uoi.gr/jspui/handle/123456789/13739
dc.rightsDefault Licence-
dc.subjecttitanium nitrideen
dc.titleCharacterization of magnetron sputtering deposited thin films of TiN for use as a metal electrode on TiN/SiO2/Si metal-oxide-semiconductor devicesen
heal.abstractTitanium nitride (TiN) thin films were deposited by dc magnetron sputtering on SiO2/n-Si substrates in order to study their use as gate electrodes in metal-oxide-semiconductor (MOS) devices. Rutherford backscattering spectroscopy was used to determine the composition of the films and the results were correlated to those obtained by electrical measurements of the constructed MOS devices. Oxygen contamination of the TiN layers was observed, with percentage and spatial variations depending on the various deposition parameters such as the deposition temperature and the substrate bias. The best electrical performance was achieved for devices where the exposed TiN surface had low oxygen contamination. From these samples, the TiNx-Si barrier height was calculated to be equal to 0.52 eV. (C) 2000 American Institute of Physics. [S0021-8979(00)00324-8].en
heal.accesscampus-
heal.fullTextAvailabilityTRUE-
heal.identifier.secondary<Go to ISI>://000165543900036-
heal.identifier.secondaryhttp://link.aip.org/getpdf/servlet/GetPDFServlet?filetype=pdf&id=JAPIAU000088000012007192000001-
heal.journalNameJournal of Applied Physicsen
heal.journalTypepeer reviewed-
heal.languageen-
heal.publicationDate2000-
heal.publisherAmerican Institute of Physicsen
heal.recordProviderΠανεπιστήμιο Ιωαννίνων. Σχολή Θετικών Επιστημών. Τμήμα Μηχανικών Επιστήμης Υλικώνel
heal.typejournalArticle-
heal.type.elΆρθρο Περιοδικούel
heal.type.enJournal articleen

Αρχεία

Φάκελος/Πακέτο αδειών

Προβολή: 1 - 1 of 1
Μικρογραφία εικόνας
Ονομα:
license.txt
Μέγεθος:
1.74 KB
Μορφότυπο:
Item-specific license agreed upon to submission
Περιγραφή:
Κατεβάστε

Συλλογές

Άρθρα σε επιστημονικά περιοδικά ( Ανοικτά)