Polymer based chemical sensor array fabricated with conventional microelectronic processes

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dc.contributor.authorKitsara, M.en
dc.contributor.authorGoustouridis, D.en
dc.contributor.authorValamontes, E.en
dc.contributor.authorOikonomou, P.en
dc.contributor.authorBeltsios, K.en
dc.contributor.authorRaptis, I.en
dc.date.accessioned2015-11-24T17:37:25Z
dc.date.available2015-11-24T17:37:25Z
dc.identifier.issn1454-4164-
dc.identifier.urihttps://olympias.lib.uoi.gr/jspui/handle/123456789/14351
dc.rightsDefault Licence-
dc.subjectchemical sensorsen
dc.subjectpolymer depositionen
dc.subjectphotolithographyen
dc.subjectvapor sorptionen
dc.subjectpolymer swellingen
dc.subjectwhite-light interferometryen
dc.subjectconducting polymeren
dc.subjectmolecular-weighten
dc.subjectfilmsen
dc.subjectmethacrylate)en
dc.subjectlithographyen
dc.subjectgasen
dc.subjectnovolacen
dc.subjectresisten
dc.subjectlayersen
dc.titlePolymer based chemical sensor array fabricated with conventional microelectronic processesen
heal.abstractA polymer array fabricated on the same substrate with conventional microelectronic processes is introduced for gas sensing applications. The process is based on photolithographic processes and takes advantage of the balance between UV exposure dose, material tone and developers used. The sensing properties of the lithographically defined films in the array were characterized for various analytes through in situ monitoring of films swelling by white light reflectance spectroscopy. The sensing responses are post processed by Principal Component Analysis and the discrimination between analytes with similar and totally different analytes is presented.en
heal.accesscampus-
heal.fullTextAvailabilityTRUE-
heal.identifier.secondary<Go to ISI>://000279165400028-
heal.journalNameJournal of Optoelectronics and Advanced Materialsen
heal.journalTypepeer reviewed-
heal.languageen-
heal.publicationDate2010-
heal.recordProviderΠανεπιστήμιο Ιωαννίνων. Σχολή Θετικών Επιστημών. Τμήμα Μηχανικών Επιστήμης Υλικώνel
heal.typejournalArticle-
heal.type.elΆρθρο Περιοδικούel
heal.type.enJournal articleen

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