Surface-activation processes and ion-solid interactions during the nucleation and growth of ultra-thin amorphous carbon films
| dc.contributor.author | Patsalas, P. | en |
| dc.contributor.author | Logothetidis, S. | en |
| dc.contributor.author | Kennou, S. | en |
| dc.contributor.author | Gravalidis, C. | en |
| dc.date.accessioned | 2015-11-24T17:38:57Z | |
| dc.date.available | 2015-11-24T17:38:57Z | |
| dc.identifier.issn | 0040-6090 | - |
| dc.identifier.uri | https://olympias.lib.uoi.gr/jspui/handle/123456789/14567 | |
| dc.rights | Default Licence | - |
| dc.subject | carbon | en |
| dc.subject | growth mechanism | en |
| dc.subject | surface composition | en |
| dc.subject | plasma processing and deposition | en |
| dc.subject | deposition mechanism | en |
| dc.subject | energy | en |
| dc.subject | model | en |
| dc.subject | xps | en |
| dc.title | Surface-activation processes and ion-solid interactions during the nucleation and growth of ultra-thin amorphous carbon films | en |
| heal.abstract | Amorphous carbon (a-C) films have been grown by processes using Ar+ or C+ ions. The films hybridization states were evaluated by Auger electron spectroscopy, X-ray photoelectron spectroscopy and X-ray reflectivity. It was found that the films grown using C+ (Ar+) exhibit a sp(2) (sp(3)) surface, while the deeper monolayers are sp(3) (mixed sp(3)-sp(2)) bonded. These results were compared with simulations of the ion-solid interactions and the results of a phenomenological model which takes into account the balance between the surface and bulk processes. We found two mechanisms of spa formation: on the surface and in the bulk of a-C. We conclude that at medium energy (> 100 eV) the surface effects are negligible (for both C+ and Ar+), while the surface processes dominate when low-energy (similar to40 eV) Ar+ ions are used. (C) 2002 Elsevier Science B.V. All rights reserved. | en |
| heal.access | campus | - |
| heal.fullTextAvailability | TRUE | - |
| heal.identifier.primary | Doi 10.1016/S0040-6090(02)01265-8 | - |
| heal.identifier.secondary | <Go to ISI>://000182500500043 | - |
| heal.journalName | Thin Solid Films | en |
| heal.journalType | peer reviewed | - |
| heal.language | en | - |
| heal.publicationDate | 2003 | - |
| heal.publisher | Elsevier | en |
| heal.recordProvider | Πανεπιστήμιο Ιωαννίνων. Σχολή Θετικών Επιστημών. Τμήμα Μηχανικών Επιστήμης Υλικών | el |
| heal.type | journalArticle | - |
| heal.type.el | Άρθρο Περιοδικού | el |
| heal.type.en | Journal article | en |
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