A lithographic polymer process sequence for chemical sensing arrays
| dc.contributor.author | Kitsara, M. | en |
| dc.contributor.author | Goustouridis, D. | en |
| dc.contributor.author | Chatzandroulis, S. | en |
| dc.contributor.author | Beltsios, K. | en |
| dc.contributor.author | Raptis, L. | en |
| dc.date.accessioned | 2015-11-24T17:32:53Z | |
| dc.date.available | 2015-11-24T17:32:53Z | |
| dc.identifier.issn | 0167-9317 | - |
| dc.identifier.uri | https://olympias.lib.uoi.gr/jspui/handle/123456789/13792 | |
| dc.rights | Default Licence | - |
| dc.subject | chemical sensors | en |
| dc.subject | polymer deposition | en |
| dc.subject | polymer swelling | en |
| dc.subject | polymer engineering | en |
| dc.subject | lithography | en |
| dc.subject | sensors | en |
| dc.title | A lithographic polymer process sequence for chemical sensing arrays | en |
| heal.abstract | A novel process for the deposition of four different patternable polymers to be used as sensing layers in chemical sensors, on the same substrate, using lithographic techniques is described. The process is combined with the engineering of the swelling properties of two of the polymeric materials upon exposure to DUV irradiation to expand the array to six or eight elements. The use of lithographic processes allows the deposition of polymeric films at the desired pattern and for a wide film thickness range. The sensing properties of the deposited and engineered films in the array were characterized by monitoring volume expansion upon exposure to volatile organic compounds. The process is particularly useful in the fabrication of chemical sensor arrays where polymers with varying sensitivities and selectivities are required. (c) 2006 Elsevier B.V. All rights reserved. | en |
| heal.access | campus | - |
| heal.fullTextAvailability | TRUE | - |
| heal.identifier.primary | DOI 10.1016/j.mee.2006.01.214 | - |
| heal.identifier.secondary | <Go to ISI>://000237581900135 | - |
| heal.identifier.secondary | http://ac.els-cdn.com/S016793170600236X/1-s2.0-S016793170600236X-main.pdf?_tid=5a5f4cb0b95e7469c0f8e85fe371a7e0&acdnat=1339662552_b4c7428a5665f365aa325d66b57214b2 | - |
| heal.journalName | Microelectronic Engineering | en |
| heal.journalType | peer reviewed | - |
| heal.language | en | - |
| heal.publicationDate | 2006 | - |
| heal.publisher | Elsevier | en |
| heal.recordProvider | Πανεπιστήμιο Ιωαννίνων. Σχολή Θετικών Επιστημών. Τμήμα Μηχανικών Επιστήμης Υλικών | el |
| heal.type | journalArticle | - |
| heal.type.el | Άρθρο Περιοδικού | el |
| heal.type.en | Journal article | en |
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