Thermophoresis of Solid Particles in Horizontal Chemical Vapor-Deposition Reactors

dc.contributor.authorFotiadis, D. I.en
dc.contributor.authorJensen, K. F.en
dc.date.accessioned2015-11-24T17:31:35Z
dc.date.available2015-11-24T17:31:35Z
dc.identifier.issn0022-0248-
dc.identifier.urihttps://olympias.lib.uoi.gr/jspui/handle/123456789/13602
dc.rightsDefault Licence-
dc.titleThermophoresis of Solid Particles in Horizontal Chemical Vapor-Deposition Reactorsen
heal.abstractTo investigate the distortion of flow visualization data for chemical vapor deposition reactors due to thermophoretic transport of the tracer particles, the motion of solid particles is studied in a horizontal chemical vapor deposition reactor. Flow and temperature fields are determined using the fmite element method. The path line of each particle is obtained on a local element-by-element basis by accounting for thermophoretic, drag, and gravity forces on each particle. Fluid flow and temperature profiles combined with thermophoretic phenomena are investigated for the first time in a complex geometry with realistic boundary conditions. Results are presented in terms of the size of the particle-free zone above the susceptor and particle path lines and velocities. The effect of the major operating parameters (susceptor temperature, inlet flow rate, carrier gas, operating pressure) on the thermophoretic transport for particles of different sizes and materials is reported. The predicted motion of solid particles shows very good agreement with smoke flow visualization and laser Doppler anemometry measurements. Related issues of particle contamination and so-called stagnant layer models are also addressed.en
heal.accesscampus-
heal.fullTextAvailabilityTRUE-
heal.identifier.primaryDoi 10.1016/0022-0248(90)90838-C-
heal.identifier.secondary<Go to ISI>://A1990DR85900007-
heal.journalNameJournal of Crystal Growthen
heal.journalTypepeer reviewed-
heal.languageen-
heal.publicationDate1990-
heal.publisherElsevieren
heal.recordProviderΠανεπιστήμιο Ιωαννίνων. Σχολή Θετικών Επιστημών. Τμήμα Μηχανικών Επιστήμης Υλικώνel
heal.typejournalArticle-
heal.type.elΆρθρο Περιοδικούel
heal.type.enJournal articleen

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